We supply a wide range of high-quality consumable parts for semiconductor plasma processes, including Insert Rings, Showerheads, Ground Rings, and Edge Rings, as well as Boats and Tubes for wafer transport and processing. Each product plays a critical role in enhancing process efficiency and yield.

Our facility solutions include a wide range of valves and accessories essential for chamber and line management, such as APC Valves, Gate Valves, Slit Valves, and Angle Valves. We also supply key vacuum system components including Dry Type, Plasma Type, and Wet Type pumps, as well as Dry Pumps, Turbo Pumps, and provide comprehensive Pump Repair services to support facility optimization.

Yes, we supply parts compatible with a wide range of equipment models from leading semiconductor manufacturers. We also offer customized solutions tailored to specific tools and process requirements. For detailed compatibility, please contact our technical support team.