Precision technology that leads the global semiconductor market
Facility Solution
Dry Pump
Oil-free design minimizes contamination risk
Enables precise vacuum control and variable pressure operation
Corrosion-resistant coating ensures long service life
Turbo Pump
Achieves high vacuum using high-speed rotating blades
Maintains stable vacuum in molecular flow regimes
Low vibration and noise, ideal for equipment integration
Pump Repair
Provides precision diagnosis and replacement of internal pump components
Rebalancing and re-lubrication to restore performance and extend lifespan
Ensures process reliability by restoring to original specifications