Precision technology that leads the global semiconductor market
Consumable Parts
Edge Ring
Protects the wafer edge to prevent plasma concentration
Maintains excellent corrosion resistance in high-temperature, high-intensity plasma environments
Reduces edge particle generation and prevents wafer breakage during processing
Showerhead
Offers outstanding chemical stability and durability against corrosive gases
Precisely controls high-energy plasma distribution
Supports optimized gas flow and thermal distribution for advanced microfabrication
Boat
Used to support wafers during semiconductor thermal processing
Maintains dimensional accuracy without warping under high temperatures and rapid thermal changes
Minimizes particle generation, meeting strict cleanroom standards
Socket
Precisely positions and secures wafers on the electrostatic chuck (ESC)
Prevents wafer movement or vibration during processing to enhance pattern accuracy
Supports electrical contact or alignment between wafer and equipment